Manufacturing method of fluid control device

ABSTRACT

A manufacturing method of a fluid control device is provided. Firstly, a housing, a piezoelectric actuator and a deformable substrate are provided. The piezoelectric actuator includes a piezoelectric element and a vibration plate having a bulge. The deformable substrate includes a communication plate and a flexible plate having a movable part. Then, the flexible plate and the communication plate are stacked and coupled. A preformed synchronous deformation process is implemented by applying at least one external force to outer portion of the deformable substrate to form a preformed synchronously-deformed structure. A force-exerting mark is formed on a surface of the preformed synchronously-deformed structure. Then, the housing, the piezoelectric actuator and the deformable substrate are sequentially stacked and coupled. The preformed synchronously-deformed structure is aligned with the bulge of the vibration plate. A specified depth is defined between the movable part and the bulge of the vibration plate.

FIELD OF THE INVENTION

The present invention relates to a manufacturing method of a fluidcontrol device, and more particularly to a manufacturing method of afluid control device with a deformable base.

BACKGROUND OF THE INVENTION

With the advancement of science and technology, fluid control devicesare widely used in many sectors such as pharmaceutical industries,computer techniques, printing industries or energy industries. Moreover,the fluid control devices are developed toward elaboration andminiaturization. The fluid control devices are important components thatare used in for example micro pumps, micro atomizers, printheads orindustrial printers for transporting fluid. Therefore, it is importantto provide an improved structure of the fluid control device.

FIG. 1A is a schematic cross-sectional view illustrating a portion of aconventional fluid control device. FIG. 1B is a schematiccross-sectional view illustrating an assembling shift condition of theconventional fluid control device. The main components of theconventional fluid control device 100 comprise a substrate 101 and apiezoelectric actuator 102. The substrate 101 and the piezoelectricactuator 102 are stacked on each other, assembled by any well knownassembling means such as adhesive, and separated from each other by agap 103. In an ideal situation, the gap 103 is maintained at a specifieddepth. More particularly, the gap 103 specifies the interval between analignment central portion of the substrate 101 and a neighborhood of acentral aperture of the piezoelectric actuator 102. In response to anapplied voltage, the piezoelectric actuator 102 is subjected todeformation and a fluid is driven to flow through various chambers ofthe fluid control device 100. In such way, the purpose of transportingthe fluid is achieved.

The piezoelectric actuator 102 and the substrate 101 of the fluidcontrol device 100 are both flat-plate structures with certainrigidities. Thus, it is difficult to precisely align these twoflat-plate structures to make the specified gap 103 and maintain it. Ifthe gap 103 was not maintained in the specified depth, an assemblingerror would occur. Further explanation is exemplified as below.Referring to FIG. 1B, the piezoelectric actuator 102 is inclined at anangle θ by one side as a pivot. Most regions of the piezoelectricactuator 102 deviate from the expected horizontal position by an offset,and the offset of each point of the regions is correlated positivelywith its parallel distance to the pivot. In other words, slightdeflection can cause a certain amount of deviation. As shown in FIG. 1B,one indicated region of the piezoelectric actuator 102 deviates from thestandard by d while another indicated region can deviate by d′. As thefluid control device is developed toward miniaturization, miniaturecomponents are adopted. Consequently, the difficulty of maintaining thespecified depth of the gap 103 has increased. The failure of maintainingthe depth of the gap 103 causes several problems. For example, if thegap 103 is increased by d′, the fluid transportation efficiency isreduced. On the other hand, if the gap 103 is decreased by d′, thedistance of the gap 103 is shortened and is unable to prevent thepiezoelectric actuator 102 from readily being contacted or interfered byother components during operation. Under this circumstance, noise isgenerated, and the performance of the fluid control device is reduced.

Since the piezoelectric actuator 102 and the substrate 101 of the fluidcontrol device 100 are flat-plate structures with certain rigidities, itis difficult to precisely align these two flat-plate structures.Especially when the sizes of the components are gradually decreased, thedifficulty of precisely aligning the miniature components is largelyenhanced. Under this circumstance, the performance of transferring thefluid is deteriorated, and the unpleasant noise is generated.

Therefore, there is a need of providing an improved fluid control devicein order to eliminate the above drawbacks.

SUMMARY OF THE INVENTION

The present invention provides a fluid control device. The fluid controldevice has a miniature substrate and a miniature piezoelectric actuator.Since the substrate is deformable, a specified depth between a flexibleplate of the substrate and a vibration plate of the piezoelectricactuator is maintained. Consequently, the assembling error is reduced,the efficiency of transferring the fluid is enhanced, and the noise isreduced. That is, the fluid control device of the present invention ismore user-friendly.

In accordance with an aspect of the present invention, there is provideda manufacturing method of a fluid control device. Firstly, a housing, apiezoelectric actuator and a deformable substrate are provided. Thepiezoelectric actuator includes a piezoelectric element and a vibrationplate. The deformable substrate includes a flexible plate and acommunication plate. The vibration plate has a first surface and anopposing second surface. A bulge is formed on the second surface of thevibration plate. The flexible plate includes a movable part. Then, theflexible plate and the communication plate are stacked on each other andcoupled, and a preformed synchronous deformation process is implementedby applying at least one external force to an outer portion of thedeformable substrate. Consequently, a preformed synchronously-deformedstructure is defined by the flexible plate and the communication platecollaboratively, wherein a force-exerting mark is formed on a surface ofthe preformed synchronously-deformed structure. Then, the housing, thepiezoelectric actuator and the deformable substrate are sequentiallystacked and coupled. The preformed synchronously-deformed structure ofthe deformable substrate is aligned with the bulge of the vibrationplate. Consequently, a specified depth between the movable part of theflexible plate and the bulge of the vibration plate is defined.

The above contents of the present invention will become more readilyapparent to those ordinarily skilled in the art after reviewing thefollowing detailed description and accompanying drawings, in which:

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a schematic cross-sectional view illustrating a portion of aconventional fluid control device;

FIG. 1B is a schematic cross-sectional view illustrating an assemblingshift condition of the conventional fluid control device;

FIG. 2 is a flowchart illustrating a manufacturing method of a fluidcontrol device according to an embodiment of the present invention;

FIG. 3A is a schematic cross-sectional view of the fluid control deviceaccording to an embodiment of the present invention;

FIG. 3B is a schematic cross-sectional view illustrating the action ofthe fluid control device of FIG. 3A;

FIG. 4A is a schematic cross-sectional view illustrating a first exampleof the preformed synchronously-deformed structure of the deformablesubstrate of the fluid control device;

FIG. 4B is a schematic cross-sectional view illustrating a secondexample of the preformed synchronously-deformed structure of thedeformable substrate of the fluid control device;

FIG. 4C is a schematic cross-sectional view illustrating a third exampleof the preformed synchronously-deformed structure of the deformablesubstrate of the fluid control device;

FIG. 4D is a schematic cross-sectional view illustrating a fourthexample of the preformed synchronously-deformed structure of thedeformable substrate of the fluid control device;

FIG. 5A is a schematic cross-sectional view illustrating a fifth exampleof the preformed synchronously-deformed structure of the deformablesubstrate of the fluid control device;

FIG. 5B is a schematic cross-sectional view illustrating a sixth exampleof the preformed synchronously-deformed structure of the deformablesubstrate of the fluid control device;

FIG. 5C is a schematic cross-sectional view illustrating a seventhexample of the preformed synchronously-deformed structure of thedeformable substrate of the fluid control device

FIG. 5D is a schematic cross-sectional view illustrating an eighthexample of the preformed synchronously-deformed structure of thedeformable substrate of the fluid control device;

FIG. 6A is a schematic cross-sectional view illustrating a ninth exampleof the preformed synchronously-deformed structure of the deformablesubstrate of the fluid control device;

FIG. 6B is a schematic cross-sectional view illustrating a tenth exampleof the preformed synchronously-deformed structure of the deformablesubstrate of the fluid control device;

FIG. 6C is a schematic cross-sectional view illustrating an eleventhexample of the preformed synchronously-deformed structure of thedeformable substrate of the fluid control device;

FIG. 6D is a schematic cross-sectional view illustrating a twelfthexample of the preformed synchronously-deformed structure of thedeformable substrate of the fluid control device; and

FIG. 7 is a schematic cross-sectional view illustrating a thirteenthexample of the preformed synchronously-deformed structure of thedeformable substrate of the fluid control device.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

The present invention will now be described more specifically withreference to the following embodiments. It is to be noted that thefollowing descriptions of preferred embodiments of this invention arepresented herein for purpose of illustration and description only. It isnot intended to be exhaustive or to be limited to the precise formdisclosed.

The present invention provides a manufacturing method of a fluid controldevice. The fluid control device can be used in many sectors such aspharmaceutical industries, energy industries computer techniques orprinting industries for transporting fluids.

FIG. 2 is a flowchart illustrating a manufacturing method of a fluidcontrol device according to an embodiment of the present invention. FIG.3A is a schematic cross-sectional view of the fluid control deviceaccording to an embodiment of the present invention. Please refer toFIGS. 2 and 3A. In a step S31, a housing 26, a piezoelectric actuator 23and a deformable substrate 20 are provided. The piezoelectric actuator23 comprises a vibration plate 230 and a piezoelectric element 233. Thevibration plate 230 has a first surface 230 b and an opposing secondsurface 230 a. Moreover, a bulge 230 c is formed on the second surface230 a of the vibration plate 230. In this embodiment, the vibrationplate 230 has a square flexible film structure. The piezoelectricelement 233 has a square shape. The side length of the piezoelectricelement 233 is not larger than the side length of the vibration plate230. Moreover, the piezoelectric element 233 is attached on the firstsurface 230 b of the vibration plate 230. By applying a voltage to thepiezoelectric element 233, the piezoelectric element 233 is subjected todeformation to result in curvy vibration of the vibration plate 230. Thepiezoelectric actuator 23 further comprises an outer frame 231 and atleast one bracket 232. The vibration plate 230 is enclosed by the outerframe 231. The profile of the outer frame 231 matches the profile of thevibration plate 230. That is, the outer frame 231 is a square hollowframe. Moreover, the at least one bracket 232 is connected between thevibration plate 230 and the outer frame 231 for elastically supportingthe vibration plate 230. The deformable substrate 20 comprises acommunication plate 21 and a flexible plate 22. The communication plate21 has an outer surface 21 a. The communication plate 21 comprises atleast one inlet 210, at least one convergence channel 211 and a centralcavity 212. The inlet 210 runs through the communication plate 21. Afirst end of the convergence channel 211 is in communication with theinlet 210, while a second end of the convergence channel 211 is incommunication with the central cavity 212. The flexible plate 22comprises a movable part 22 a and a fixed part 22 b. The fixed part 22 bis fixed on the communication plate 21 in order to connect the flexibleplate 22 with the communication plate 21. The movable part 22 a isaligned with the central cavity 212. A central aperture 220 is formedwithin the movable part 22 a and aligned with the central cavity 212 ofthe communication plate 21. The housing 26 comprises at least one outlet261. Furthermore, the housing 26 can be a single plate or a frameconsists of a bottom plate and a sidewall structure 260. The sidewallstructure 260 extends from the peripheral of the bottom plate. Anaccommodation space is defined by the bottom plate and the sidewallstructure 260 collaboratively. The piezoelectric actuator 23 is disposedwithin the accommodation space. The piezoelectric actuator 23 and thedeformable substrate 20 are covered by the housing 26. In addition, atemporary storage chamber A is formed between the housing 26 and thepiezoelectric actuator 23 for temporarily storing the fluid. The outlet261 is in communication with the temporary storage chamber A.Consequently, the fluid can be discharged to exterior of the housing 26from interior of the housing 26 through the outlet 261.

In a step S32, the flexible plate 22 and the communication plate 21 arestacked on each other and coupled with each other. Then, a preformedsynchronous deformation process is implemented by applying one or moreexternal force to an outer portion of the deformable substrate 20. Theouter portion may be at least one surface of the flexible plate 22 or atleast one surface of the communication plate 21. As a consequence, apreformed synchronously-deformed structure is defined by the flexibleplate 22 and the communication plate 21 collaboratively. Preferably butnot exclusively, the external force is a contact force. By applying theexternal force to the outer portion of the deformable substrate 20, thedeformable substrate 20 is subjected to synchronous deformation and thepreformed synchronously-deformed structure is consequently formed (seeFIG. 4A to 7). In addition, a force-exerting mark (not shown) is formedon a surface of the preformed synchronously-deformed structure. Theforce-exerting mark may be an indentation caused in the process ofstamping.

In a step S33, the housing 26, the piezoelectric actuator 23 and thedeformable substrate 20 are sequentially stacked on each other andcoupled with each other to be combined. The preformedsynchronously-deformed structure of the deformable substrate 20 isaligned with the bulge 230 c of the vibration plate 230. Consequently,there is a specified depth δ defined between the movable part 22 a ofthe flexible plate 22 and the bulge 230 c of the vibration plate 230. Inthis step, the piezoelectric actuator 23 is covered by the housing 26(see FIG. 3A).

Please refer to FIG. 3A. The deformable substrate 20 shown in FIG. 3Ahas not been subjected to the synchronous deformation, while FIG. 3A isused for describing the stacked structure of the fluid control device 2.After the piezoelectric actuator 23 is received within an accommodationspace 26 a of the housing 26, the deformable substrate 20 or thepreformed synchronously-deformed structure of the deformable substrate20 is combined with the piezoelectric actuator 23 and collectivelyreceived within the accommodation space 26 a, therefore sealing thebottom of the piezoelectric actuator 23. In the process of assembling,the movable part 22 a of the flexible plate 22 and the bulge 230 c ofthe piezoelectric actuator 23 are aligned. Moreover, the preformedsynchronously-deformed structure of the deformable substrate 20 is bentin the direction toward or away the bulge 230 c of the vibration plate230, so that the specified depth δ is defined between the movable part22 a of the flexible plate 22 and the bulge 230 c of the vibration plate230. Consequently, the fluid control device 2 with the preformedsynchronously-deformed structure is produced.

FIG. 3B is a schematic cross-sectional view illustrating the action ofthe fluid control device of FIG. 3A. Please refer to FIGS. 3A and 3B.After the communication plate 21, the flexible plate 22 and thepiezoelectric actuator 23 are coupled to be combined together, aconvergence chamber is defined by partial flexible plate 22 includingthe central aperture 220 within, and the central cavity 212 of thecommunication plate 21 collaboratively. There is a gap h between theflexible plate 22 and the outer frame 231 of the piezoelectric actuator23. Preferably but not exclusively, a medium (e.g., a conductiveadhesive) is filled in the gap h. Consequently, the flexible plate 22and the outer frame 231 of the piezoelectric actuator 23 are connectedwith each other through the medium. At the same time, the specifieddepth δ is defined between the movable part 22 a of the flexible plate22 and the bulge 230 c of the piezoelectric actuator 23. When thevibration plate 230 of the piezoelectric actuator 23 vibrates, the fluidin a compressible chamber B defined between the flexible plate 22 andthe piezoelectric actuator 23 is compressed, while the specified depth δreduces due to the transformation of the flexible plate 22.Consequently, the pressure and the flow rate of the fluid are increased.The specified depth δ is a proper distance that is sufficient to reducethe contact interference between the movable part 22 a of the flexibleplate 22 and the bulge 230 c of the piezoelectric actuator 23, thusreducing the noise generation. Moreover, the convergence chamber definedby the flexible plate 22 and the central cavity 212 of the communicationplate 21 is in communication with the compressible chamber B through thecentral aperture 220.

When the fluid control device 2 is enabled, the piezoelectric element233 of the piezoelectric actuator 23 is actuated in response to anapplied voltage. Consequently, the vibration plate 230 of thepiezoelectric actuator 23 vibrates along a vertical direction in areciprocating manner. When the vibration plate 230 vibrates upwardly inresponse to the applied voltage, since the flexible plate 22 is lightand thin, the flexible plate 22 vibrates simultaneously because of theresonance of the vibration plate 230. More especially, the movable part22 a of the flexible plate 22 is subjected to a curvy deformation. Thecentral aperture 220 is located near or located at the center of theflexible plate 22. Since the vibration plate 230 vibrates upwardly, themovable part 22 a of the flexible plate 22 correspondingly movesupwardly, making an external fluid introduced by the at least one inlet210, through the at least one convergence channel 211, into theconvergence chamber. After that, the fluid is transferred upwardly tothe compressible chamber B through the central aperture 220 of theflexible plate 22. As the flexible plate 22 is subjected to deformation,the volume of the compressible chamber B is compressed such that itenhances the kinetic energy of the fluid therein and make it flow to thebilateral sides, and then transferred upwardly through the vacant spacebetween the vibration plate 230 and the bracket 232. As the vibrationplate 230 vibrates downwardly, the movable part 22 a of the flexibleplate 22 correspondingly moves downwardly and subjected to the downwardcurvy deformation because of the resonance of the vibration plate 230.Meanwhile, less fluid is converged to the convergence chamber in thecentral cavity 212 of the communication plate 21. Since thepiezoelectric actuator 23 vibrates downwardly, the volume of thecompressible chamber B is increased. Above-mentioned actions depicted inFIG. 3B are repeatedly done so as to expand or compress the compressiblechamber B, thus enlarging the amount of inhalation or discharge of thefluid.

As mentioned above, the deformable substrate 20 is made by stacking andcoupling the communication plate 21 and the flexible plate 22. Thepreformed synchronously-deformed structure is defined by thecommunication plate 21 and the flexible plate 22 collaboratively.Specifically, the preformed synchronously-deformed structure is definedby a synchronously-deformed region of the communication plate 21 and asynchronously-deformed region of the flexible plate 22 collaboratively.When one of the communication plate 21 and the flexible plate 22 issubjected to deformation, another is also subjected to deformationsynchronously. Moreover, the deformation shape of the communicationplate 21 and the deformation shape of the flexible plate 22 areidentical. As a result, after the corresponding surfaces of thecommunication plate 21 and the flexible plate 22 are contacted with andpositioned on each other, there is merely little interval or paralleloffset happened therebetween.

As previously described, the piezoelectric actuator and the substrate ofthe conventional fluid control device are flat-plate structures withcertain rigidities. Consequently, it is difficult to precisely alignthese two flat-plate structures and make them separated by the specifiedgap (i.e., maintain the specified depth). That is, the misalignment ofthe piezoelectric actuator and the substrate could readily occur. Inaccordance with the present invention, the preformedsynchronously-deformed structure of the deformable substrate 20 isdefined in response to the synchronous deformation of the communicationplate 21 and the flexible plate 22. Moreover, the function of thepreformed synchronously-deformed structure is similar to the function ofthe substrate of the conventional technology. More especially, thepreformed synchronously-deformed structure defined by the communicationplate 21 and the flexible plate 22 has various implementation examples.In these implementation examples, a compressible chamber B correspondingto the specified depth δ (i.e., a specified gap between the preformedsynchronously-deformed structure and the vibration plate 230 of thepiezoelectric actuator 23) is maintained according to the practicalrequirements. Consequently, the fluid control device 2 is developedtoward miniaturization, and the miniature components are adopted. Due tothe preformed synchronously-deformed structure, it is easy to maintainthe specified gap between the deformable substrate and the vibrationplate. As previously described, the conventional technology has toprecisely align two large-area flat-plate structures. In accordance withthe feature of the present invention, the area to be aligned reducesbecause the deformable substrate 20 has the synchronously-deformedstructure and is a non-flat-plate structure. The shape of thesynchronously-deformed structure is not restricted. For example, thesynchronously-deformed structure has a curvy shape, a conical shape, acurvy-surface profile or an irregular shape. Compared with aligning twolarge areas of the two flat plates, aligning one small area of anon-flat-plate with a flat plate is much easier, and therefore reducesassembling errors. Under this circumstance, the performance oftransferring the fluid is enhanced and the noise is reduced.

Preferably but not exclusively, the preformed synchronously-deformedstructure has a curvy shape, a conical shape, a curvy-surface profile oran irregular shape. Some examples of the preformedsynchronously-deformed structure will be described as follows.

Please refer to FIGS. 4A and 4C. FIG. 4A is a schematic cross-sectionalview illustrating a first example of the preformedsynchronously-deformed structure of the deformable substrate of thefluid control device. FIG. 4C is a schematic cross-sectional viewillustrating a third example of the preformed synchronously-deformedstructure of the deformable substrate of the fluid control device. Inthe examples of FIGS. 4A and 4C, the preformed synchronously-deformedstructure is defined by the entire communication plate 21 and the entireflexible plate 22 collaboratively. That is, the synchronously-deformedregion of the flexible plate 22 includes the movable part 22 a and theregion beyond the movable part 22 a. The deformation direction of theexample of FIG. 4A and the deformation direction of the example of FIG.4C are opposite. As shown in FIG. 4A, the outer surface 21 a of thecommunication plate 21 of the deformable substrate 20 is bent in thedirection toward the bulge 230 c of the vibration plate 230. Moreover,the movable part 22 a and the region beyond the movable part 22 a of theflexible plate 22 are also bent in the direction toward the bulge 230 cof the vibration plate 230. The bent communication plate 21 and the bentflexible plate 22 define the preformed synchronously-deformed structureof the deformable substrate 20. As shown in FIG. 4C, the outer surface21 a of the communication plate 21 of the deformable substrate 20 isbent in the direction away from the bulge 230 c of the vibration plate230. Simultaneously, the movable part 22 a and the region beyond themovable part 22 a of the flexible plate 22 are also bent in thedirection away from the bulge 230 c of the vibration plate 230. As aconsequence, the preformed synchronously-deformed structure of thedeformable substrate 20 is defined. Under this circumstance, thespecified depth δ is defined and maintained between the movable part 22a of the flexible plate 22 and the bulge 230 c of the vibration plate230. Consequently, the fluid control device 2 with the preformedsynchronously-deformed structure is produced.

Please refer to FIGS. 5A and 5C. FIG. 5A is a schematic cross-sectionalview illustrating a fifth example of the preformedsynchronously-deformed structure of the deformable substrate of thefluid control device. FIG. 5C is a schematic cross-sectional viewillustrating a seventh example of the preformed synchronously-deformedstructure of the deformable substrate of the fluid control device. Inthe examples of FIGS. 5A and 5C, the preformed synchronously-deformedstructure is a conical synchronously-deformed structure that is definedby the entire communication plate 21 and the entire flexible plate 22collaboratively. That is, the synchronously-deformed region of theflexible plate 22 includes the movable part 22 a and the region beyondthe movable part 22 a of the flexible plate 22. The deformationdirection of the example of FIG. 5A and the deformation direction of theexample of FIG. 5C are opposite. As shown in FIG. 5A, the outer surface21 a of the communication plate 21 of the deformable substrate 20 isbent in the direction toward the bulge 230 c of the vibration plate 230.Moreover, the movable part 22 a and the region beyond the movable part22 a of the flexible plate 22 are also bent in the direction toward thebulge 230 c of the vibration plate 230. As a consequence, the conicalsynchronously-deformed structure of the deformable substrate 20 isdefined. As shown in FIG. 5C, the outer surface 21 a of thecommunication plate 21 of the deformable substrate 20 is bent in thedirection away from the bulge 230 c of the vibration plate 230.Moreover, the movable part 22 a and the region beyond the movable part22 a of the flexible plate 22 are also bent in the direction away fromthe bulge 230 c of the vibration plate 230. As a consequence, theconical synchronously-deformed structure of the deformable substrate 20is defined. Under this circumstance, the specified depth δ is definedand maintained between the movable part 22 a of the flexible plate 22and the bulge 230 c of the vibration plate 230. Consequently, the fluidcontrol device 2 with the conical synchronously-deformed structure isproduced.

Please refer to FIGS. 6A and 6C. FIG. 6A is a schematic cross-sectionalview illustrating a ninth example of the preformedsynchronously-deformed structure of the deformable substrate of thefluid control device. FIG. 6C is a schematic cross-sectional viewillustrating an eleventh example of the preformed synchronously-deformedstructure of the deformable substrate of the fluid control device. Inthe examples of FIGS. 6A and 6C, the preformed synchronously-deformedstructure is a convex synchronously-deformed structure that is definedby the entire communication plate 21 and the entire flexible plate 22collaboratively. That is, the convex synchronously-deformed region ofthe flexible plate 22 includes the movable part 22 a and the regionbeyond the movable part 22 a. The deformation direction of the exampleof FIG. 6A and the deformation direction of the example of FIG. 6C areopposite. As shown in FIG. 6A, the outer surface 21 a of thecommunication plate 21 of the deformable substrate 20 is bent in thedirection toward the bulge 230 c of the vibration plate 230. Moreover,the movable part 22 a and the region beyond the movable part 22 a of theflexible plate 22 are also bent in the direction toward the bulge 230 cof the vibration plate 230. As a consequence, the convexsynchronously-deformed structure of the deformable substrate 20 isdefined. As shown in FIG. 6C, the outer surface 21 a of thecommunication plate 21 of the deformable substrate 20 is bent in thedirection away from the bulge 230 c of the vibration plate 230.Moreover, the movable part 22 a and the region beyond the movable part22 a of the flexible plate 22 are also bent in the direction away fromthe bulge 230 c of the vibration plate 230. As a consequence, the convexsynchronously-deformed structure of the deformable substrate 20 isdefined. Under this circumstance, the specified depth δ is defined andmaintained between the movable part 22 a of the flexible plate 22 andthe bulge 230 c of the vibration plate 230. Consequently, the fluidcontrol device 2 with the convex synchronously-deformed structure isproduced.

Alternatively, the preformed synchronously-deformed structure is definedby a part of the communication plate 21 and a part of the flexible plate22 collaboratively. That is, the synchronously-deformed region of theflexible plate 22 includes the region of the movable part 22 a only, andthe scale of the synchronously-deformed region of the communicationplate 21 corresponds to the synchronously-deformed region of theflexible plate 22. In addition, the synchronously-deformed structure ofthe deformable substrate 20 includes but not limited to a curvystructure, a conical structure and a convex structure.

Please refer to FIGS. 4B and 4D. FIG. 4B is a schematic cross-sectionalview illustrating a second example of the preformedsynchronously-deformed structure of the deformable substrate of thefluid control device. FIG. 4D is a schematic cross-sectional viewillustrating a fourth example of the preformed synchronously-deformedstructure of the deformable substrate of the fluid control device. Inthe examples of FIGS. 4B and 4D, the preformed synchronously-deformedstructure is defined by a part of the communication plate 21 and a partof the flexible plate 22 collaboratively. The synchronously-deformedregion of the flexible plate 22 includes the region of the movable part22 a only, and the synchronously-deformed region of the communicationplate 21 corresponds to the synchronously-deformed region of theflexible plate 22. That is, the synchronously-deformed structures ofFIGS. 4B and 4D are produced by partially deforming the deformablesubstrate 20. The deformation direction of the example of FIG. 4B andthe deformation direction of the example of FIG. 4D are opposite. Asshown in FIG. 4B, the outer surface 21 a of the communication plate 21of the deformable substrate 20 is partially bent in the direction towardthe bulge 230 c of the vibration plate 230. Moreover, the region of themovable part 22 a of the flexible plate 22 is also partially bent in thedirection toward the bulge 230 c of the vibration plate 230. As aconsequence, the partially-bent synchronously-deformed structure of thedeformable substrate 20 is defined. As shown in FIG. 4D, the outersurface 21 a of the communication plate 21 of the deformable substrate20 is partially bent in the direction away from the bulge 230 c of thevibration plate 230. Moreover, the region of the movable part 22 a ofthe flexible plate 22 is also partially bent in the direction away fromthe bulge 230 c of the vibration plate 230. As a consequence, thepartially-bent synchronously-deformed structure of the deformablesubstrate 20 is defined. Under this circumstance, the specified depth δis defined and maintained between the movable part 22 a of the flexibleplate 22 and the bulge 230 c of the vibration plate 230. That is, thespecified depth δ between the movable part 22 a of the flexible plate 22and the bulge 230 c of the vibration plate 230 is maintained.Consequently, the fluid control device 2 with the partially-bentsynchronously-deformed structure is produced.

Please refer to FIGS. 5B and 5D. FIG. 5B is a schematic cross-sectionalview illustrating a sixth example of the preformedsynchronously-deformed structure of the deformable substrate of thefluid control device. FIG. 5D is a schematic cross-sectional viewillustrating an eighth example of the preformed synchronously-deformedstructure of the deformable substrate of the fluid control device. Inthe examples of FIGS. 5B and 5D, the preformed synchronously-deformedstructure is defined by a part of the communication plate 21 and a partof the flexible plate 22 collaboratively. The synchronously-deformedregion of the flexible plate 22 includes the region of the movable part22 a only, and the synchronously-deformed region of the communicationplate 21 corresponds to the synchronously-deformed region of theflexible plate 22. That is, the synchronously-deformed structures ofFIGS. 5B and 5D are produced by partially deforming the deformablesubstrates 20 to conical synchronously-deformed structures. Thedeformation direction of the example of FIG. 5B and the deformationdirection of the example of FIG. 5D are opposite. As shown in FIG. 5B,the outer surface 21 a of the communication plate 21 of the deformablesubstrate 20 is partially bent in the direction toward the bulge 230 cof the vibration plate 230. Moreover, the region of the movable part 22a of the flexible plate 22 is also partially bent in the directiontoward the bulge 230 c of the vibration plate 230. As a consequence, theconical synchronously-deformed structure of the deformable substrate 20is defined. As shown in FIG. 5D, the outer surface 21 a of thecommunication plate 21 of the deformable substrate 20 is partially bentin the direction away from the bulge 230 c of the vibration plate 230.Moreover, the region of the movable part 22 a of the flexible plate 22is also partially bent in the direction away from the bulge 230 c of thevibration plate 230. As a consequence, the conicalsynchronously-deformed structure of the deformable substrate 20 isdefined. Under this circumstance, the specified depth δ is defined andmaintained between the movable part 22 a of the flexible plate 22 andthe bulge 230 c of the vibration plate 230. Consequently, the fluidcontrol device 2 with the conical synchronously-deformed structure isproduced.

Please refer to FIGS. 6B and 6D. FIG. 6B is a schematic cross-sectionalview illustrating a tenth example of the preformedsynchronously-deformed structure of the deformable substrate of thefluid control device. FIG. 6D is a schematic cross-sectional viewillustrating a twelfth example of the preformed synchronously-deformedstructure of the deformable substrate of the fluid control device. Inthe examples of FIGS. 6B and 6D, the preformed synchronously-deformedstructure is defined by a part of the communication plate 21 and a partof the flexible plate 22 collaboratively. The synchronously-deformedregion of the flexible plate 22 includes the region of the movable part22 a only, and the synchronously-deformed region of the communicationplate 21 corresponds to the synchronously-deformed region of theflexible plate 22. That is, the preformed synchronously-deformedstructures of FIGS. 6B and 6D are produced by partially deforming thedeformable substrates 20 to the convex synchronously-deformedstructures. The deformation direction of the example of FIG. 6B and thedeformation direction of the example of FIG. 6D are opposite. As shownin FIG. 6B, the outer surface 21 a of the communication plate 21 of thedeformable substrate 20 is partially bent in the direction toward thebulge 230 c of the vibration plate 230. Moreover, the region of themovable part 22 a of the flexible plate 22 is also partially bent in thedirection toward the bulge 230 c of the vibration plate 230. As aconsequence, the convex synchronously-deformed structure of thedeformable substrate 20 is defined. As shown in FIG. 6D, the outersurface 21 a of the communication plate 21 of the deformable substrate20 is partially bent in the direction away from the bulge 230 c of thevibration plate 230. Moreover, the region of the movable part 22 a ofthe flexible plate 22 is also partially bent in the direction away fromthe bulge 230 c of the vibration plate 230. As a consequence, the convexsynchronously-deformed structure of the deformable substrate 20 isdefined. Under this circumstance, the specified depth δ is defined andmaintained between the movable part 22 a of the flexible plate 22 andthe bulge 230 c of the vibration plate 230. Consequently, the fluidcontrol device 2 with the convex synchronously-deformed structure isproduced.

FIG. 7 is a schematic cross-sectional view illustrating an example ofthe synchronously-deformed structure of the deformable substrate of thefluid control device. The preformed synchronously-deformed structurealso can be a curvy-surface synchronously-deformed structure, which iscomposed of plural curvy surfaces with different or identicalcurvatures. As shown in FIG. 7, the curvy-surface synchronously-deformedstructure comprises plural curvy surfaces with different curvatures. Aset of the plural curvy surfaces are formed on the outer surface 21 a ofthe communication plate 21 of the deformable substrate 20, while anotherset of curvy surfaces corresponding to the former set are formed on theflexible plate 22. Under this circumstance, the specified depth δ isdefined and maintained between the curvy-surface synchronously-deformedstructure and the bulge 230 c of the vibration plate 230. Consequently,the fluid control device 2 with the curvy-surface synchronously-deformedstructure is produced.

In some other embodiments, the preformed synchronously-deformedstructure is an irregular synchronously-deformed structure, which isproduced by making two sets of identical irregular surfaces respectivelyon the communication plate 21 and the flexible plate 22 of thedeformable substrate 20. Consequently, the irregularsynchronously-deformed structure is defined by the communication plate21 and the flexible plate 22. The preformed synchronously-deformedstructure is bent in the direction toward or away the bulge 230 c of thevibration plate 230. Under this circumstance, the specified depth δ isdefined and maintained between the synchronously-deformed structure andthe bulge 230 c of the vibration plate 230.

It is noted that numerous modifications and alterations may be madewhile retaining the teachings of the invention. For example, thepreformed synchronously-deformed structure may be varied according tothe practical requirements.

In some embodiments, the vibration plate 230 of the piezoelectricactuator 23 is not equipped with the bulge 230. That is, the secondsurface 230 a of the vibration plate 230 is a flat surface. The gapbetween the deformable substrate 20 and the piezoelectric actuator 23 isequal to the distance between the flexible plate 22 of the deformablesubstrate 20 and the second surface 230 a of the vibration plate 230. Apreformed synchronously-deformed structure of the deformable substrate20 is produced after the fluid control device is assembled, and aspecified depth δ is defined and maintained between the preformedsynchronously-deformed structure and the vibration plate 230. Thespecified depth δ is sufficient to reduce the contact interferencebetween the flexible plate 22 and the vibration plate 230 of thepiezoelectric actuator 23. Consequently, the efficiency of transferringthe fluid is enhanced, and the noise is reduced.

The shape of the preformed synchronously-deformed structure is notrestricted. For example, the preformed synchronously-deformed structurehas a curvy shape, a conical shape, a curvy-surface profile or anirregular shape.

In the above embodiments, the fluid control device comprises thepreformed synchronously-deformed structure. The specified depth δ isdefined and maintained between the movable part 22 a of the flexibleplate 22 and the bulge 230 c of the vibration plate 230. Due to thespecified depth δ, the gap can be retained in an adequate range that isnot too large to cause inefficiency of fluid transmission, and not toosmall to cause the contact interference between the flexible plate 22and the piezoelectric actuator 23. That is, assembling errors of thefluid control device 2 reduces. Consequently, the efficiency oftransferring the fluid is enhanced, and the noise is diminished.

From the above descriptions, the present invention provides a fluidcontrol device. Before the fluid control device is assembled, apreformed synchronous deformation process is implemented by applying atleast one external force to the outer portion of the deformablesubstrate so as to form a preformed synchronously-deformed structure.After the preformed synchronously-deformed structure and thepiezoelectric actuator are combined together, the specified depthbetween the movable part of the flexible plate and the bulge of thevibration plate is defined. The specified depth is sufficient to reducethe contact interference between the flexible plate and thepiezoelectric actuator. Consequently, the efficiency of transferring thefluid is enhanced, and the noise is reduced. Since the specified depthis advantageous for increasing the efficiency of transferring the fluidand reducing the noise, the product yield is increased and the qualityof the fluid control device is significantly enhanced.

While the invention has been described in terms of what is presentlyconsidered to be the most practical and preferred embodiments, it is tobe understood that the invention needs not be limited to the disclosedembodiments. On the contrary, it is intended to cover variousmodifications and similar arrangements included within the spirit andscope of the appended claims which are to be accorded with the broadestinterpretation so as to encompass all such modifications and similarstructures.

What is claimed is:
 1. A manufacturing method of a fluid control device, comprising: (a) providing a housing, a piezoelectric actuator and a deformable substrate, wherein the piezoelectric actuator comprises a piezoelectric element and a vibration plate, and the deformable substrate comprises a flexible plate and a communication plate, wherein the vibration plate has a first surface and an opposing second surface, a bulge is formed on the second surface of the vibration plate, and the flexible plate comprises a movable part; (b) stacking and coupling the flexible plate and the communication plate of the deformable substrate, and implementing a preformed synchronous deformation process by applying at least one external force to an exterior portion of the deformable substrate to form a preformed synchronously-deformed structure defined by the flexible plate and the communication plate collaboratively, wherein a force-exerting mark is formed on a surface of the preformed synchronously-deformed structure where the at least one external force is applied; and (c) coupling the housing, the piezoelectric actuator and the deformable substrate which are sequentially stacked, wherein the preformed synchronously-deformed structure of the deformable substrate is aligned with the bulge of the vibration plate to define a specified depth between the movable part of the flexible plate and the bulge of the vibration plate.
 2. The manufacturing method according to claim 1, wherein the preformed synchronous deformation process is implemented by applying the at least one external force to at least one surface of the flexible plate of the deformable substrate.
 3. The manufacturing method according to claim 1, wherein the preformed synchronous deformation process is implemented by applying the at least one external force to at least one surface of the communication plate of the deformable substrate.
 4. The manufacturing method according to claim 1, wherein a synchronously-deformed region of the flexible plate for defining the preformed synchronously-deformed structure includes the movable part, the preformed synchronously-deformed structure is a curvy synchronously-deformed structure, and the specified depth is defined between the curvy synchronously-deformed structure and the bulge of the vibration plate.
 5. The manufacturing method according to claim 1, wherein a synchronously-deformed region of the flexible plate for defining the preformed synchronously-deformed structure includes the movable part, the preformed synchronously-deformed structure is a conical synchronously-deformed structure, and the specified depth is defined between the conical synchronously-deformed structure and the bulge of the vibration plate.
 6. The manufacturing method according to claim 1, wherein a synchronously-deformed region of the flexible plate for defining the preformed synchronously-deformed structure includes the movable part, the preformed synchronously-deformed structure is a convex synchronously-deformed structure, and the specified depth is defined between the convex synchronously-deformed structure and the bulge of the vibration plate.
 7. The manufacturing method according to claim 1, wherein a synchronously-deformed region of the flexible plate for defining the preformed synchronously-deformed structure includes the movable part and a region beyond the movable part of the flexible plate, and the specified depth is defined between the preformed synchronously-deformed structure and the bulge of the vibration plate.
 8. The manufacturing method according to claim 1, wherein a synchronously-deformed region of the flexible plate for defining the preformed synchronously-deformed structure includes the movable part and a region beyond the movable part of the flexible plate, the preformed synchronously-deformed structure is a curvy synchronously-deformed structure, and the specified depth is defined between the curvy synchronously-deformed structure and the bulge of the vibration plate.
 9. The manufacturing method according to claim 1, wherein a synchronously-deformed region of the flexible plate for defining the preformed synchronously-deformed structure includes the movable part and a region beyond the movable part of the flexible plate, the preformed synchronously-deformed structure is a conical synchronously-deformed structure, and the specified depth is defined between the conical synchronously-deformed structure and the bulge of the vibration plate.
 10. The manufacturing method according to claim 1, wherein a synchronously-deformed region of the flexible plate for defining the preformed synchronously-deformed structure includes the movable part and a region beyond the movable part of the flexible plate, the preformed synchronously-deformed structure is a convex synchronously-deformed structure, and the specified depth is defined between the convex synchronously-deformed structure and the bulge of the vibration plate.
 11. The manufacturing method according to claim 1, wherein the preformed synchronously-deformed structure is a curvy-surface synchronously-deformed structure composed of the communication plate and the flexible plate, the curvy-surface synchronously-deformed structure comprises plural curvy surfaces with different curvatures, and a specified depth is defined between the curvy-surface synchronously-deformed structure and the bulge of the vibration plate.
 12. The manufacturing method according to claim 1, wherein the preformed synchronously-deformed structure is a curvy-surface synchronously-deformed structure composed of the communication plate and the flexible plate, the curvy-surface synchronously-deformed structure comprises plural curvy surfaces with an identical curvature, and the specified depth is defined between the curvy-surface synchronously-deformed structure and the bulge of the vibration plate.
 13. The manufacturing method according to claim 1, wherein the preformed synchronously-deformed structure is an irregular synchronously-deformed structure composed of the communication plate and the flexible plate, and the specified depth is defined between the irregular synchronously-deformed structure and the bulge of the vibration plate.
 14. The manufacturing method according to claim 1, wherein the preformed synchronously-deformed structure is a bent synchronously-deformed structure that is bent in a direction toward the bulge of the vibration plate, and the specified depth is defined between the bent synchronously-deformed structure and the bulge of the vibration plate.
 15. The manufacturing method according to claim 1, wherein the preformed synchronously-deformed structure is a bent synchronously-deformed structure that is bent in a direction away from the bulge of the vibration plate, and the specified depth is defined between the bent synchronously-deformed structure and the bulge of the vibration plate.
 16. The manufacturing method according to claim 1, wherein the vibration plate of the piezoelectric actuator has a square shape, and the piezoelectric actuator further comprises: an outer frame arranged around the vibration plate; and at least one bracket connected between the vibration plate and the outer frame for elastically supporting the vibration plate.
 17. The manufacturing method according to claim 1, wherein the preformed synchronously-deformed structure and the vibration plate are connected with each other through a medium, and the medium is an adhesive.
 18. The manufacturing method according to claim 1, wherein a temporary storage chamber is formed between the housing and the piezoelectric actuator, wherein the housing comprises at least one outlet, and the temporary storage chamber is in communication with an exterior of the housing through the at least one outlet.
 19. The manufacturing method according to claim 1, wherein the flexible plate comprises a central aperture, wherein the central aperture is located at or located near a center of the movable part of the flexible plate for allowing a fluid to go through.
 20. The manufacturing method according to claim 19, wherein the communication plate comprises at least one inlet, at least one convergence channel and a central cavity, wherein the at least one inlet runs through the communication plate and is in communication with a first end of the at least one convergence channel, and a second end of the at least one convergence channel is in communication with the central cavity, wherein the central cavity is aligned with the movable part of the flexible plate and in communication with the central aperture of the flexible plate. 